D. Inagaki

High-Performance Metal Hard Mask Process Using Fiber-Textured TiN Film for Cu Interconnects

N. Torazawa, T. Harada, T. Kabe, 2016 .

Enhancement of crystallization of Si films on quartz substrates by electric fields

Kiyotaka Sato, S. Horita, D. Inagaki, 1999 .

High-Performance Extremely Low-k Film Integration Technology with Metal Hard Mask Process for Cu Interconnects

H. Korogi, N. Torazawa, T. Harada, 2016 .