J. Jeon

A concave-patterned TiN/PECVD-Si3N4 /TiN diaphragm MEMS acoustic sensor based on a polyimide sacrificial layer

Y. G. Kim, S. Q. Lee, Sang-Gug Lee, 2015 .

MEMS Capacitive Microphone with Dual-Anchored Membrane

Woo-Seok Yang, C. Je, J. Jeon, 2017 .

Open-circuit sensitivity model based on empirical parameters for a capacitive-type MEMS acoustic sensor

S. Q. Lee, Sang-Gug Lee, Jaewoo Lee, 2016 .