C.M. Waits

Dynamic Friction and Wear in a Planar-Contact Encapsulated Microball Bearing Using an Integrated Microturbine

R. Ghodssi, R. Ghodssi, M. McCarthy, 2009, Journal of Microelectromechanical Systems.

Double-Exposure Grayscale Photolithography

R. Ghodssi, B. Morgan, R. Ghodssi, 2009, Journal of microelectromechanical systems.

Development of a deep silicon phase Fresnel lens using Gray-scale lithography and deep reactive ion etching

R. Ghodssi, J. Krizmanic, B. Morgan, 2004, Journal of Microelectromechanical Systems.