T. J. Dalton

Role of fluorocarbon film formation in the etching of silicon, silicon dioxide, silicon nitride, and amorphous hydrogenated silicon carbide

Eric A. Joseph, Christer Hedlund, Gottlieb S. Oehrlein, 2004 .

Low open-area endpoint detection using a PCA-based T/sup 2/ statistic and Q statistic on optical emission spectroscopy measurements

Duane S. Boning, B. E. Goodlin, Herbert H. Sawin, 2000 .