Katsuhiro Yokota

Resistivities of titanium nitride films prepared onto silicon by an ion beam assisted deposition method

Masami Ohnishi, K. Yokota, Kazuhiro Nakamura, 2004 .

Preparation of titanium-oxide films by solid-state reactions of titanium/silicon-oxide/silicon structures

Tomoyuki Yamada, Fumiyoshi Miyashita, Tomoyuki Yamada, 1998 .