Xiaolin Li

Design and fabrication of a MEMS capacitive accelerometer with fully symmetrical double-sided H-shaped beam structure

Xiaofeng Zhou, Lufeng Che, Youling Lin, 2015 .

Fabrication of a MEMS capacitive accelerometer with symmetrical double-sided serpentine beam-mass structure

Xiaofeng Zhou, Lufeng Che, Youling Lin, 2014 .

A novel sandwich capacitive accelerometer with a symmetrical structure fabricated from a D-SOI wafer

Xiaofeng Zhou, Lufeng Che, Yuelin Wang, 2012 .

A novel sandwich capacitive accelerometer with a double-sided 16-beam-mass structure

Wei Li, Lufeng Che, Zhaohui Song, 2014 .