Clive Hayzelden

Production metrology and control of color filter array photolithography for CMOS imagers

John N. Helbert, Arnold W. Yanof, A. Daou, 1999, Advanced Lithography.

Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A.

Clive Hayzelden, Crispin J. D. Hetherington, Frances Ross, 1998 .

Application of model-based lithographic process control for cost-effective IC manufacturing at 0.13 μm and beyond

Kevin M. Monahan, Patrick J. Lord, Waiman Ng, 1999, Advanced Lithography.

Characterization of copper oxidation and reduction using spectroscopic ellipsometry

Carlos L. Ygartua, Clive Hayzelden, Ronald A. Powell, 2000, SPIE Advanced Lithography.

Gate Dielectric Metrology

Clive Hayzelden, 2001 .