Y. Yamamura

A simple analysis on angular dependence of light-ion sputtering yield

Y. Yamamura, Y. Yamamura, 1984 .

Monte Carlo simulation of the thermalization of sputtered atoms and reflected atoms in the magnetron sputtering discharge

Y. Yamamura, Y. Yamamura, M. Ishida, 1995 .

Over-cosine angular distributions of sputtered atoms at normal incidence

Katsunori Muraoka, Y. Yamamura, K. Muraoka, 1989 .

DATA COMPILATION OF ANGULAR DISTRIBUTIONS OF SPUTTERED ATOMS

Y. Yamamura, H. Tawara, Y. Yamamura, 1990 .

Theory of sputtering and comparison to experimental data

Y. Yamamura, Y. Yamamura, 1982 .