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Effect of substrate temperature on the growth rate and surface morphology of heteroepitaxial indium antimonide layers grown on (100) GaAs by metalorganic magnetron sputtering

James B. Webb, T. S. Rao, J. McCaffrey, 1989 .

The preparation of epitaxial InSb films by magnetron sputtering

J. Ehrismann, James B. Webb, C. Halpin, 1987 .