Ken Murayama

发表

Proposal for new atomic force microscopy (AFM) imaging for a high aspect structure (digital probing mode AFM)

Takenori Hiroki, Sumio Hosaka, Kouji Kuroda, 2001 .

Critical-dimension measurement using multi-angle-scanning method in atomic force microscope

Tsuneo Terasawa, Satoshi Gonda, Sumio Hosaka, 2006 .

{110}-facets formation by hydrogen thermal etching on sidewalls of Si and strained-Si fin structures

Shinichi Takagi, Naoharu Sugiyama, Norio Hirashita, 2008 .

Scanning tunneling microscope measurement of insulator surfaces

Seiichi Kondo, Hiroshi Kuroda, Yasuo Wada, 1994 .

Three-Dimensional Metrology for CMP process evaluation with In-line Wide-Area Atomic Force Microscope

Toru Kurenuma, Yuichi Kunitomo, Manabu Edamura, 2011 .

Evaluation of Thin Silicon Dioxide Layers by Beam Assisted Scanning Tunneling Microscope

Hiroshi Kuroda, Yasuo Wada, Seiji Heike, 1995 .

In-line Atomic Force Microscope for Semiconductor Process Evaluation

Sumio Hosaka, Yukio Kembo, Hirokazu Koyabu, 2002 .

Height Measurement Using High-Precision Atomic Force Microscope Scanner Combined with Laser Interferometers

Tsuneo Terasawa, Satoshi Gonda, Sumio Hosaka, 2006 .