Katsumi Takahiro

Structural Properties of Amorphous Carbon Nitride Films Prepared by Reactive RF-Magnetron Sputtering

Shinji Nagata, Noriaki Nakayama, S. Nagata, 1993 .

WNx diffusion barriers between Si and Cu

Tomohiro Ohta, Masanori Murakami, Takeo Oku, 1996 .