Jaume Esteve

发表

Instantaneous de-embedding of the on-wafer equivalent-circuit parameters of acoustic resonator (FBAR) for integrated circuit applications

Pascal Nouet, Humberto Campanella, Arantxa Uranga, 2007, SBCCI '07.

SiNERGY, a project on energy harvesting and microstorage empowered by Silicon technologies

Jaume Esteve, Luis Fonseca, Carlos Calaza, 2015, 2015 10th Spanish Conference on Electron Devices (CDE).

Doping and structural properties for the phosphorous-doped polysilicon layers used for micromechanical applications

Jaume Esteve, Florin Gaiseanu, Carles Cane, 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Design and characterization of a magnetic digital flow regulator

Jaume Esteve, Raquel Perez-Castillejos, Jasmina Casals-Terré, 2010 .

From materials to devices: Bottom-up integration of nanomaterials onto silicon microstructures for thermoelectric and piezoelectric applications

Jaume Esteve, Luis Fonseca, Carlos Calaza, 2017, 2017 Spanish Conference on Electron Devices (CDE).

Linear and non-linear behavior of mechanical resonators for optimized inertial electromagnetic microgenerators

Jaume Esteve, Emile Martincic, Joan Ramon Morante, 2008, 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS.

Twin-mass accelerometer optimization to reduce the package stresses

Jaume Esteve, José Antonio Plaza, Carles Cané, 2000 .

CMOS integrated MEMS resonator for RF applications

Núria Barniol, Jaume Esteve, Francesc Torres, 2006, 2006 IEEE International Symposium on Circuits and Systems.

CMOS Cantilever-based Oscillator for Attogram Mass Sensing

Núria Barniol, Jaume Esteve, Francesc Torres, 2007, 2007 IEEE International Symposium on Circuits and Systems.

Tactile Acuity Charts: A Reliable Measure of Spatial Acuity

Humberto Campanella, Jaume Esteve, Brigitte Röder, 2014, PloS one.

Mechanical modeling of thermally actuated LCE-CNT composite

Humberto Campanella, Jaume Esteve, Eva M. Campo, 2011, NanoScience + Engineering.

MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing (Invited Paper)

Jaume Esteve, Gabriel Abadal, Jaume Verd, 2005, SPIE Microtechnologies.

Protective coatings for Al metallizations obtained by plasma polymerization

Salvador Bosch, Jaume Esteve, Francesc Benitez, 2000, SPIE Optics + Photonics.

Electrostatically controlled multi-purpose torsional structures obtained on monocrystalline silicon

Jaume Esteve, Josep Samitier, O. Ruiz, 1996 .

Mixing in a 220MHz CMOS-MEMS

Núria Barniol, Jaume Esteve, Francesc Torres, 2007, 2007 IEEE International Symposium on Circuits and Systems.

Electron microscopy of polymer-carbon nanotubes composites

Humberto Campanella, Jaume Esteve, Eva M. Campo, 2010, Scanning Microscopies.

A read-out strategy and circuit design for high frequency MEMS resonators

Humberto Campanella, Arantxa Uranga, Núria Barniol, 2005, 2005 IEEE International Symposium on Circuits and Systems.

Sensitivity of thin-film bulk acoustic resonators (FBAR) to localized mechanical forces

Humberto Campanella, Jaume Esteve, C. J. Camargo, 2013 .

Analysis of nonlinearity in high sensitivity piezoresistive pressure sensors

Jaume Esteve, Josep Samitier, O. Ruiz, 1993 .

Integrable silicon microsystem for three-dimensional flow focusing

Jaume Esteve, Jose M. Quero, Antonio Luque, 2005, SPIE Microtechnologies.

Mechanical stress in polysilicon layers and evaluation by a new procedure

Jaume Esteve, Florin Gaiseanu, 1999, Smart Materials, Nano-, and Micro- Smart Systems.

Band-pass transimpedance read-out circuit for UHF MEMS resonator applications

Humberto Campanella, Arantxa Uranga, Jaume Esteve, 2005, SPIE Microtechnologies.

Microstamped opto-mechanical actuator for tactile displays

Humberto Campanella, Jaume Esteve, Carlos J. Camargo, 2011, NanoScience + Engineering.

Highly sensitive silicon micro-g accelerometers with optical output

Salvatore Baglio, Jaume Esteve, Salvatore Castorina, 2004, 2004 IEEE International Symposium on Circuits and Systems (IEEE Cat. No.04CH37512).

High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors

Núria Barniol, Jaume Esteve, Gabriel Abadal, 2005, 2005 IEEE International Symposium on Circuits and Systems.

FX Interactive: growth and decline of the Spanish video games publisher

Federico Peinado, Jaume Esteve, 2017, CoSECivi.

Novel optimized design of a piezoelectric energy harvester in a package for low amplitude vibrations

Jaume Esteve, Gonzalo Murillo, Gabriel Abadal, 2013 .

Fabrication and characterization of a twin-mass accelerometer

Jaume Esteve, Josep Samitier, O. Ruiz, 1994 .

Micro-barcodes for biological applications

Jaume Esteve, Jose Antonio Plaza, Marta Duch, 2011, Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011.

Optimization of a Piezoelectric Energy Harvester and Design of a Charge Pump Converter for CMOS-MEMS Monolithic Integration †

Jaume Esteve, Gonzalo Murillo, Jordi Sacristán, 2019, Sensors.

Zero-level packaging of MEMS in standard CMOS technology

Arantxa Uranga, Jaume Esteve, G. Abadal, 2010 .

Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator

Arantxa Uranga, Jaume Esteve, Gabriel Abadal, 2007 .

Microinductive Signal Conditioning With Resonant Differential Filters: High-Sensitivity Biodetection Applications

Salvatore Baglio, Jaume Esteve, Joan Ramon Morante, 2007, IEEE Transactions on Instrumentation and Measurement.

CMOS degradation effects due to electron beam lithography in smart NEMS fabrication

Jaume Esteve, Francesca Campabadal, Celeste Fleta, 2005, SPIE Microtechnologies.

Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

Jaume Esteve, Gabriel Abadal, Jaume Verd, 2005, SPIE Microtechnologies.

Test structures for nondestructive in-situ control of the anodic bonding quality

Jaume Esteve, Emilio Lora-Tamayo, Jose A. Plaza, 1996, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

SOI-silicon as structural layer for NEMS applications

Jaume Esteve, Francesca Campabadal, Nuria Barniol, 2003, SPIE Microtechnologies.

Diffusion-induced dislocations in highly boron-doped silicon layers used for bulk micromachining applications

Jaume Esteve, Florin Gaiseanu, Gudrun Kissinger, 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Jaume Esteve, Francesca Campabadal, Anja Boisen, 2003 .

Electrochemical etch-stop characteristics of TMAH:IPA solutions

Jaume Esteve, M. C. Acero, Chr. Burrer, 1995 .

Etching front control of strips for corner compensation

Jaume Esteve, Joan Bausells, Chr. Burrer, 1993 .

Influence of the degradation on the surface states and electrical characteristics of EOS structures

Jaume Esteve, Enric Cabruja, A. Merlos, 1991 .

Electromechanical Nanogenerator–Cell Interaction Modulates Cell Activity

Jaume Esteve, Gonzalo Murillo, Lleonard Barrios, 2017, Advanced materials.

Resonant silicon accelerometers in bulk micromachining technology-an approach

Jaume Esteve, Emilio Lora-Tamayo, C. Burrer, 1996 .

Electrochemical deposition of Cu and Ni/Cu multilayers in Si Microsystem Technologies

Jaume Esteve, Alejandro Pérez-Rodríguez, Christophe Serre, 2005 .

Tactile device based on opto-mechanical actuation of liquid crystal elastomers

Humberto Campanella, Jaume Esteve, Patrick Bruns, 2014 .

Piezoresistive accelerometers for MCM package

Jaume Esteve, Enric Cabruja, José Antonio Plaza, 2002 .

Technological aspects on the fabrication of silicon-based optical accelerometer with ARROW structures

Jaume Esteve, Carlos Domínguez, Iñigo Salinas, 2004 .

Application of simple thioether ionophores to silver ion-selective CHEMFETs

Jaume Esteve, Abdelhamid Errachid, A. Merlos, 1995 .

Surface micromachining technology applied to the fabrication of a FET pressure sensor

Jaume Esteve, José Antonio Plaza, Emilio Lora-Tamayo, 1996 .

Ion beam synthesis of polycrystalline SiC on SiO2 structures for MEMS applications

Jaume Esteve, Wolfgang Skorupa, Joan Ramon Morante, 2000 .

Si technology based microinductive devices for biodetection applications

Jaume Esteve, Joan Ramon Morante, Alejandro Pérez-Rodríguez, 2006 .

Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications

Jaume Esteve, José Antonio Plaza, Eva M. Campo, 2009 .

Fully CMOS integrated low voltage 100 MHz MEMS resonator

Arantxa Uranga, Jaume Esteve, G. Abadal, 2005 .

Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects

Humberto Campanella, Arantxa Uranga, Jaume Esteve, 2008 .

Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

Arantxa Uranga, Jaume Esteve, Francesc Torres, 2007 .

Thermally driven micromechanical bridge resonators

Jaume Esteve, Chr. Burrer, 1994 .

Localised actuation in composites containing carbon nanotubes and liquid crystalline elastomers.

Humberto Campanella, Jaume Esteve, J. E. Marshall, 2011, Macromolecular rapid communications.

A novel resonant silicon accelerometer in bulk-micromachining technology

Jaume Esteve, Chr. Burrer, 1995 .

An analytical model for passive microvalves

Jaume Esteve, Josep Samitier, José Antonio Plaza, 2001 .

Batch fabrication of optical actuators using nanotube–elastomer composites towards refreshable Braille displays

Humberto Campanella, Jaume Esteve, C. J. Camargo, 2012 .

Intracellular polysilicon barcodes for cell tracking.

Jaume Esteve, José Antonio Plaza, Rodrigo Gómez, 2009, Small.

A disposable micro-electro-optical interface for flow monitoring in bio-microfluidics

Luigi Fortuna, Francesca Sapuppo, Maide Bucolo, 2008 .

New bulk accelerometer for triaxial detection

Jaume Esteve, José Antonio Plaza, Emilio Lora-Tamayo, 1998 .

The use of ferrofluids in micromechanics

Pere Losantos, Carles Cané, Jaume Esteve, 2000 .

Nanocantilever integrated with CMOS circuitry for high sensitivity mass detection

Jaume Esteve, Francesca Campabadal, Anja Boisen, 2000 .

A New Single-Sensor Magnetic Field Gradiometer

Jaume Esteve, José Antonio Plaza, H. Guerrero, 2009 .

Focused-ion-beam-assisted tuning of thin-film bulk acoustic wave resonators (FBARs)

Humberto Campanella, Arantxa Uranga, Jaume Esteve, 2007 .

Electrochemical deposition of metal layers and structures for Si-based microsystems

Jaume Esteve, Joan Ramon Morante, Alejandro Pérez-Rodríguez, 2002 .

Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist

Jaume Esteve, Francesca Campabadal, Anja Boisen, 2004 .

AFM lithography for the definition of nanometre scale gaps: application to the fabrication of a cantilever-based sensor with electrochemical current detection

Jaume Esteve, Anja Boisen, Francesc Pérez-Murano, 2004 .

Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

Humberto Campanella, Arantxa Uranga, Jaume Esteve, 2006 .

Internalization and cytotoxicity analysis of silicon-based microparticles in macrophages and embryos

Jaume Esteve, Elisabet Fernández-Rosas, Rodrigo Gómez, 2010, Biomedical microdevices.

Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

Jaume Esteve, Francesca Campabadal, Anja Boisen, 2004 .

Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

Xavier Borrisé, Jaume Esteve, Francesca Campabadal, 2001 .

Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication

Jaume Esteve, Raquel Perez-Castillejos, José Antonio Plaza, 2008 .

Determination of micromechanical properties of thin films by beam bending measurements with an atomic force microscope

Jaume Esteve, Alejandro Pérez-Rodríguez, Christophe Serre, 1999 .

A novel embryo identification system by direct tagging of mouse embryos using silicon-based barcodes.

Jaume Esteve, José Antonio Plaza, Josep Santaló, 2011, Human reproduction.

Parasitic effect on silicon MEMS resonator model parameters

Jaume Esteve, Josep Montserrat, J. Esteve, 2007 .

Integrated tunneling sensor for nanoelectromechanical systems

Jaume Esteve, Anja Boisen, G. Abadal, 2006 .

Design, fabrication and characterization of an externally actuated ON/OFF microvalve

Jaume Esteve, Raquel Perez-Castillejos, José Antonio Plaza, 2008 .

New FET accelerometer based on surface micromachining

Jaume Esteve, José Antonio Plaza, Emilio Lora-Tamayo, 1997 .

High-precision BESOI-based resonant accelerometer

Jaume Esteve, Chr. Burrer, 1995 .

Simple technology for bulk accelerometer based on bond and etch back silicon on insulator wafers

Jaume Esteve, José Antonio Plaza, Emilio Lora-Tamayo, 1998 .

Linear and Non Linear Behaviour of Mechanical Resonators for Optimized Inertial Electromagnetic Microgenerators pdf

Jaume Esteve, Emile Martincic, Joan Ramon Morante, 2008, ArXiv.

Modeling the Thermal Actuation in a Thermo-Pneumatic Micropump

Jaume Esteve, Josep Samitier, José Antonio Plaza, 2003 .