G. Jiang

The effects of vacuum ultraviolet radiation on low-k dielectric films

Sebastian Engelmann, Qinghuang Lin, Nicholas C. M. Fuller, 2012 .

The nature of the defects generated from plasma exposure in pristine and ultraviolet-cured low-k organosilicate glass

Yoshio Nishi, J. L. Shohet, G. A. Antonelli, 2011 .

Defects in low-k organosilicate glass and their response to processing as measured with electron-spin resonance

Yoshio Nishi, J. L. Shohet, G. A. Antonelli, 2011 .