C. Ataman

Vertical Resonant Comb Actuators for Fourier Transform Spectroscopy

H. Urey, C. Ataman, 2006, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006..

Two-axis MEMS scanner for display and imaging applications

H. Urey, D. Brown, I. Basdogan, 2005, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005..

Fabrication and characterization of 3D integrated 2 DOF Micromirror Arrays for excessive thermal loads

W. Noell, F. Jutzi, N. de Rooij, 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

Mechanically coupled comb drive MEMS stages

H. Urey, S. Holmstrom, H. Urey, 2008, 2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics.

Microfabrication of Capillary Electrospray Emitters

H. Shea, C. Ataman, S. Dandavino, 2011 .

Wafer-level integrated electrospray emitters for a pumpless microthruster system operating in high efficiency ion-mode

H. Shea, C. Ataman, S. Dandavino, 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

A dual-axis high fill-factor micromirror array for high thermal loads

W. Noell, F. Jutzi, N. de Rooij, 2011, 16th International Conference on Optical MEMS and Nanophotonics.