Namil Koo

Lithography potentials of UV-nanoimprint

A. Fuchs, Thorsten Wahlbrink, U. Plachetka, 2008 .

The fabrication of a flexible mold for high resolution soft ultraviolet nanoimprint lithography

Eung-Sug Lee, Heinrich Kurz, Jens Bolten, 2008, Nanotechnology.

Fabrication of photonic components by nanoimprint technology within ePIXnet

Jurriaan Huskens, Anders Kristensen, U. Plachetka, 2008 .

Improved mold fabrication for the definition of high quality nanopatterns by Soft UV-Nanoimprint lithography using diluted PDMS material

Heinrich Kurz, Jens Bolten, A. Fuchs, 2007 .

Improved CD control and line edge roughness in E-beam lithography through combining proximity effect correction with gray scale techniques

Heinrich Kurz, Jens Bolten, Thorsten Wahlbrink, 2010 .