L. Malek

Projection ion beam lithography

R. W. Hill, Hans Loschner, Gerhard Stengl, 1993 .

In situ distortion measurement of an ion projector with 5× ion‐optical reduction

Hans Loschner, Gerhard Stengl, P. Wolf, 1992 .

Progress in ion projection lithography

Hans Loschner, Gerhard Stengl, P. Wolf, 1992 .