Merritt Funk
发表
Merritt Funk,
Kevin Lally,
Radha Sundararajan,
2002
.
Merritt Funk,
Wesley C. Natzle,
2005
.
Merritt Funk,
Matthew Sendelbach,
Andres Munoz,
2006,
SPIE Advanced Lithography.
Merritt Funk,
Kevin Lally,
Radha Sundararajan,
2002,
SPIE Advanced Lithography.
Merritt Funk,
Radha Sundararajan,
Kenneth A. Bandy,
2009,
Advanced Lithography.
Merritt Funk,
Radha Sundararajan,
Kenneth A. Bandy,
2008,
SPIE Advanced Lithography.
Charles N. Archie,
Merritt Funk,
Matthew Sendelbach,
2004,
SPIE Advanced Lithography.
Merritt Funk,
Kevin Lally,
Radha Sundararajan,
2002
.
Vincent M. Donnelly,
V. M. Donnelly,
Merritt Funk,
2009
.
Vincent M. Donnelly,
V. M. Donnelly,
Merritt Funk,
2008
.
Merritt Funk,
Radha Sundararajan,
Thomas F Edgar,
2010,
IEEE Transactions on Semiconductor Manufacturing.