Peng Wang

Investigation of E-Beam Evaporated Silicon Film Properties for MEMS Applications

C. Kwok, S. Varlamov, A. Michael, 2015, Journal of Microelectromechanical Systems.

Cantilever Inverse Taper Coupler With SiO2 Gap for Submicrometer Silicon Waveguides

C. Kwok, A. Michael, Peng Wang, 2017, IEEE Photonics Technology Letters.

Temperature stability study of resonant angular scanning micromirrors with electrostatic comb-drive actuators

Huikai Xie, Jianhua Li, Peng Wang, 2021 .

On-chip optical nano-scale displacement sensor

Peng Wang, Chee Yee Kwok, Aron Michael, 2013, Smart Materials, Nano-, and Micro- Smart Systems.

A 1×20 MEMS mirror array with large scan angle and low driving voltage for optical wavelength-selective switches

Huikai Xie, Lei Xiao, Boqian Sun, 2021 .

Silicon waveguide cantilever displacement sensor for potential application for on-chip high speed AFM

C. Kwok, A. Michael, Peng Wang, 2018 .

Nondestructive On-Site Detection of Soybean Contents Based on An Electrothermal MEMS Fourier Transform Spectrometer

Huikai Xie, Weiguo Liu, Donglin Wang, 2019, IEEE Photonics Journal.