M. Kawata

Characterization of stress generated in polycrystalline silicon during thermal oxidation by laser Raman spectroscopy

M. Kawata, T. Katoda, 1994 .

Analysis of oxide–nitride–oxide/Si(111) interfaces by optical second harmonic generation and secondary ion mass spectroscopy

E. Hasegawa, M. Kawata, H. Hirayama, 1996 .

Characterization of stress in doped and undoped polycrystalline silicon before and after annealing or oxidation with laser raman spectroscopy

S. Nadahara, M. Kawata, T. Katoda, 1990 .