I. Plotnik

Low stress tungsten absorber for X-ray masks

Henry I. Smith, Y. Ku, I. Plotnik, 1990 .

Use of ion implantation to eliminate stress‐induced distortion in x‐ray masks

Henry I. Smith, Y. Ku, I. Plotnik, 1988 .

0 Submicron Structures Technology and Research Academic and Research Staff

Park, J. M. Carter, Atwater, 2009 .

Fabrication of sub‐100‐nm linewidth periodic structures for study of quantum effects from interference and confinement in Si inversion layers

Henry I. Smith, E. Anderson, D. Antoniadis, 1986 .

Fabrication of high-energy x-ray transmission gratings for the Advanced X-ray Astrophysics Facility (AXAF)

Mark L. Schattenburg, Henry I. Smith, Richard J. Aucoin, 1994, Optics & Photonics.

Reactive‐ion etching of 0.2 μm period gratings in tungsten and molybdenum using CBrF3

Henry I. Smith, M. Schattenburg, I. Plotnik, 1985 .