Sung-Gyu Lee

A possible wafer heating during EUV exposure

Hye-Keun Oh, Se-Hun Oh, Sung-Gyu Lee, 2018, Photomask Technology.

Pattern degradation with larger particles on EUV pellicle

Hye-Keun Oh, Se-Hun Oh, Sung-Gyu Lee, 2018, Photomask Technology.

Influence of a wrinkle in terms of critical dimension variation caused by transmission nonuniformity and a particle defect on extreme ultraviolet pellicle

Guk-Jin Kim, In-Seon Kim, Michael Yeung, 2017 .

Wrinkle formation analysis in extreme-ultraviolet pellicle

Guk-Jin Kim, Hye-Keun Oh, Sung-Gyu Lee, 2017, Photomask Technology.

Thermo-mechanical behavior analysis of extreme-ultraviolet pellicle cooling with H2 flow

Hye-Keun Oh, Sung-Gyu Lee, Eun-Sang Park, 2017, Photomask Technology.

Lifetime impact on residual stress of EUV pellicle

Hye-Keun Oh, Sung-Gyu Lee, Eun-Sang Park, 2017, Photomask Technology.

Search for multi-stack EUV pellicle membrane for EUV non-actinic mask inspection

Guk-Jin Kim, Hye-Keun Oh, Su-Mi Hur, 2017, Photomask Technology.

Anti-inflammatory and anti-osteoarthritis effects of fermented Achyranthes japonica Nakai.

Sung-Gyu Lee, Eun-Ok Kim, Sang-Woon Choi, 2012, Journal of ethnopharmacology.