Bo Peng

Measurement technique for characterizing odd aberration of lithographic projection optics based on dipole illumination

Qiongyan Yuan, Zicheng Qiu, Xiangzhao Wang, 2010 .

Aberration measurement of lithographic projection lens by using a translational symmetry Alt-PSM grating mark

Xiang-zhao Wang, L. Duan, Q. Yuan, 2009, 2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics.

Translational-symmetry alternating phase shifting mask grating mark used in a linear measurement model of lithographic projection lens aberrations.

Lifeng Duan, Qiongyan Yuan, Zicheng Qiu, 2009, Applied optics.