Yosuke Niimi

Fabrication and flow-sensor application of flexible thermal MEMS device based on Cu on polyimide substrate

M. Shikida, Yosuke Niimi, S. Shibata, 2017 .

Polymer micromachining based on Cu On Polyimide substrate and its application to flexible MEMS sensor

M. Shikida, Yosuke Niimi, S. Shibata, 2014, IEEE/LEOS International Conference on Optical MEMS.

Mechanical strengthening of Si cantilever by chemical KOH etching and its surface analysis by TEM and AFM

M. Shikida, Yosuke Niimi, T. Sugino, 2014, Microsystem Technologies.

Fabrication and flow-sensor application of flexible thermal MEMS device based on Cu on polyimide substrate

M. Shikida, Yosuke Niimi, S. Shibata, 2015, Microsystem Technologies.