Y. Kitagawa

Current status and future prospect of the Nb-based fabrication process for single flux quantum circuits

Shuichi Nagasawa, Mutsuo Hidaka, Tetsuro Satoh, 2006 .

Reliability evaluation of Nb 10 kA/cm2 fabrication process for large-scale SFQ circuits

Shuichi Nagasawa, Mutsuo Hidaka, Hiroyuki Akaike, 2005 .

New Nb multi-layer fabrication process for large-scale SFQ circuits

Kazuyoshi Takagi, Nobuyuki Yoshikawa, Naofumi Takagi, 2009 .

Development of advanced Nb process for SFQ circuits

Shuichi Nagasawa, Mutsuo Hidaka, Hiroyuki Akaike, 2004 .

Investigation of SFQ integrated circuits using Nb fabrication technology

Shuichi Tahara, M. Tanaka, Hideaki Numata, 1999 .

Nb/AlOx/Nb junctions fabricated using ECR plasma etching

Shuichi Nagasawa, Mutsuo Hidaka, Hiroyuki Akaike, 2004 .