Karen Reinhardt

Use of beam profile reflectometry to determine depth of silicon etch damage and contamination

Karen Reinhardt, Susan M. Kelso, 1995, Advanced Lithography.

Weaving Science Inquiry and Continuous Assessment: Using Formative Assessment to Improve Learning

Karen Reinhardt, Maura O'Brien Carlson, Gregg E. Humphrey, 2003 .

Characterization of silicon damage during LDD oxide spacer etch with the use of thermal-wave-modulated reflectance

Karen Reinhardt, Francois M. Dumesnil, 1992, Other Conferences.

Handbook of silicon wafer cleaning technology

Karen Reinhardt, W. Kern, K. Reinhardt, 2018 .