M. Tabata

Novel piezoelectric-driven XYθ wafer table for an electron beam image projector

T. Tojo, Ichiro Mori, Toshiaki Shinozaki, 1985 .

An electron beam image projection system with automatic wafer handling

I. Mori, K. Sugihara, M. Tabata, 1985 .

Piezoelectrically driven XYθ table for submicron lithography systems

Toru Tojo, Ichiro Mori, Toshiaki Shinozaki, 1989 .