Sergei Latinski

Accurate electrical prediction of memory array through SEM-based edge-contour extraction using SPICE simulation

Shimon Levi, Ofer Adan, Ovadya Menadeva, 2009, Advanced Lithography.

Accurate device simulations through CD-SEM-based edge-contour extraction

Ovadya Menadeva, Amit Siany, Ram Peltinov, 2008, SPIE Advanced Lithography.