M. Fujishima

Simultaneous Realization of Stabilized Temperature Characteristics and Low-Voltage Driving of a Micromirror Using the Thin-Film Torsion Bar of Tensile Poly-Si

K. Hane, H. Miura, M. Sasaki, 2009, IEEE Journal of Selected Topics in Quantum Electronics.

Nonlinear spring effect of tense thin-film torsion bar combined with electrostatic driving

K. Hane, S. Kumagai, M. Sasaki, 2013 .

Stabilization of temperature characteristics of micromirror for low-voltage driving using thin film torsion bar of tensile poly-Si

K. Hane, H. Miura, M. Sasaki, 2008, 2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics.