Dai Sugimoto

Projection moire alignment technique for mix and match lithographic system

Shuzo Hattori, Tsutomu Nomura, Yoshiyuki Uchida, 1990, Advanced Lithography.

Moire Alignment Technique For Projection Photolithographic System

Shuzo Hattori, Tsutomu Nomura, Yoshiyuki Uchida, 1989, Advanced Lithography.

Disk-shaped VUV+O source used as resist asher and resist developer

Shuzo Hattori, Dai Sugimoto, George Collins, 1991, Other Conferences.

An alignment technique using diffracted moiré signals

Yoshiyuki Uchida, Shuzo Hattori, Dai Sugimoto, 1989 .