Shintaro Takada

Evaluation of Finished Extreme Ultraviolet Lithography (EUVL) Masks Using a EUV Microscope

Hiroo Kinoshita, Tsuneyuki Haga, Satoshi Kakunai, 2003 .

Investigation of Contamination Removal from Finished EUVL Mask

Hiroo Kinoshita, Morio Hosoya, Tsutomu Shoki, 2003 .

Actinic mask metrology for extreme ultraviolet lithography

Masayuki Endo, Hiroo Kinoshita, Tsuneyuki Haga, 2004 .