B. P. Aragon

Plasma molding over surface topography: Simulation and measurement of ion fluxes, energies and angular distributions over trenches in RF high density plasmas

Joseph Ray Woodworth, T. W. Hamilton, R. J. Shul, 2003 .

Ion energy and angular distributions in inductively coupled radio frequency discharges in argon

D. C. Meister, Joseph Ray Woodworth, Herbert H. Sawin, 1996 .