Steve Wang

Metrology of 3D IC with X-ray Microscopy and nano-scale X-ray CT

Jeff Gelb, Wenbing Yun, S. H. Lau, 2009, 2009 IEEE International Interconnect Technology Conference.

X-ray computed tomography in Zernike phase contrast mode at 8 keV with 50-nm resolution using Cu rotating anode X-ray source

Hongtao Cui, Michael Feser, Fred Duewer, 2007 .

A Transmission X-ray Microscope (TXM) for Non-destructive 3D Imaging of ICs at Sub-100 nm Resolution

Alan Lyon, Wenbing Yun, Markus Kuhn, 2003 .