N.C. Perkins

Novel integrated shock protection for MEMS

N. Yazdi, Sang Won Yoon, K. Najafi, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

Shock Protection Using Integrated Nonlinear Spring Shock Stops

N. Yazdi, J. Chae, K. Najafi, 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.