Yang Xu

Single-chip condenser miniature microphone with a high sensitive circular corrugated diaphragm

Zhijian Li, Jun Ma, Jing Chen, 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

Study of anisotropic etching of (1 0 0) Si with ultrasonic agitation

Huajun Fang, Jing Chen, Zhijian Li, 2002 .

On the single-chip condenser miniature microphone using DRIE and backside etching techniques

Jun Ma, Jing Chen, Zhijian Li, 2003 .