A. W. Ott

Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry

Steven M. George, S. George, J. Klaus, 1997 .

Modification of Porous Alumina Membranes Using Al2O3 Atomic Layer Controlled Deposition

Steven M. George, S. George, J. Way, 1997 .

Atomic layer controlled deposition of Al2O3 films using binary reaction sequence chemistry

Steven M. George, S. George, J. Way, 1996 .

Atomic layer controlled deposition of SiO2 and Al2O3 using ABAB… binary reaction sequence chemistry

Steven M. George, M. L. Wise, A. C. Dillon, 1994 .

Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence

Steven M. George, A. C. Dillon, A. Dillon, 1995 .