Petra Amirfeiz

Wafer bonding using oxygen plasma treatment in RIE and ICP RIE

Stefan Bengtsson, Anke Sanz-Velasco, Petra Amirfeiz, 2001 .

Formation of Silicon Structures by Plasma‐Activated Wafer Bonding

Stefan Bengtsson, S. Bengtsson, L. Börjesson, 2000 .

Room Temperature Wafer Bonding Using Oxygen Plasma Treatment in Reactive Ion Etchers With and Without Inductively Coupled Plasma

Stefan Bengtsson, Anke Sanz-Velasco, S. Bengtsson, 2003 .

Plasma assisted room temperature bonding for MST

Stefan Bengtsson, S. Bengtsson, Petra Amirfeiz, 2001 .