Don L. Kendall

On the nature of the kink in the carrier profile for phosphorus‐diffused layers in silicon

D. L. Kendall, F. N. Schwettmann, Don L. Kendall, 1972 .

Wet Chemical Etching of Silicon and SiO 2 , and Ten Challenges for Micromachiners

Don L. Kendall, Robert A. Shoultz, 1997 .

A new theory for the anisotropic etching of silicon and some underdeveloped chemical micromachining concepts

D. L. Kendall, Don L. Kendall, 1990 .