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Role of volatile liquids in debris and hole taper angle reduction during femtosecond laser drilling of silicon

Hongyu Zheng, L. Jiao, Hongyu Y Zheng, 2011 .

The effect of assist liquid on the hole taper improvement in femtosecond laser percussion drilling

L. M. Wee, Lishi Jiao, E. Y. K. Ng, 2011 .

Influence of substrate heating on hole geometry and spatter area in femtosecond laser drilling of silicon

Seung Ki Moon, Hungsun Son, Hongyu Zheng, 2014 .