Charles L. Sloan

A Silicon-Based Shape Memory Alloy Microvalve

John D. Busch, A. Johnson, J. D. Busch, 1992 .

Fabrication of silicon-based shape memory alloy micro-actuators

John D. Busch, A. Johnson, J. D. Busch, 1992 .

Microactuators of thin film shape memory alloy on silicon

A. Johnson, J. D. Busch, Charles L. Sloan, 1992 .