Xinghua Wang

Out-of-plane micro-force function generator with inherent self-feedback for micro-deformation modifying

Xuezhong Wu, Dingbang Xiao, Zhanqiang Hou, 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

Vertical signal feedthrough for sandwich devices based on anodic bonding and after laser trimming

Qiang Xu, Xuezhong Wu, Dingbang Xiao, 2016, 2016 IEEE International Symposium on Inertial Sensors and Systems.

A novel fabrication method based on an after thermal oxidation process for the realization of silicon-beams with normative polygon cross sections shapes

Xuezhong Wu, Dingbang Xiao, Zhanqiang Hou, 2013 .

Enhanced sensitivity in a butterfly gyroscope with a hexagonal oblique beam

Xuezhong Wu, Dingbang Xiao, Zhanqiang Hou, 2015 .