Frédéric Benninger

High aspect ratio, 3D structuring of photoresist materials by ion beam LIGA

Hubert Lorenz, Arnaud Bertsch, Frans Munnik, 2003 .

Creating sub-surface channels in PMMA with ion beam lithography in only one step

Serguei Mikhailov, Frans Munnik, S. Mikhailov, 2003 .