Darryl W. Peters

Defect printability for soft x-ray microlithography

Bernard J. Dardzinski, Darryl W. Peters, Robert D. Frankel, 1990, Advanced Lithography.

Preliminary Testing Results For A New X-Ray Stepper

Darryl W. Peters, Stephen M. Preston, David N. Tomes, 1989, Advanced Lithography.

Linewidth Control In Trilevel Etching

A. Kornblit, Darryl W. Peters, Michael J. Grieco, 1987, Advanced Lithography.

Application And Analysis Of Production Suitability Of A Laser-Based Plasma X-Ray Stepper

Darryl W. Peters, Robert D. Frankel, Stephen M. Preston, 1988, Medical Imaging.

Soft X-Ray Induced Chemical Reactions In Novolak Resist

Darryl W. Peters, Richard J. West, David N. Tomes, 1989, Advanced Lithography.

Fabrication and testing of 0.1‐μm‐linewidth microgap x‐ray masks

Mark L. Schattenburg, Darryl W. Peters, Robert D. Frankel, 1990 .

Excimer laser based lithography: a deep-ultraviolet wafer stepper for VLSI processing

Tanya E. Jewell, Victor Pol, Darryl W. Peters, 1987 .