Robert D. Frankel

Defect printability for soft x-ray microlithography

Bernard J. Dardzinski, Darryl W. Peters, Robert D. Frankel, 1990, Advanced Lithography.

Quantum state control interference lithography and trim double patterning for 32-16-nm lithography

Bruce W. Smith, Robert D. Frankel, Andrew Estroff, 2007, SPIE Advanced Lithography.

Development of a polycapillary collimator for point-source x-ray lithography

Robert D. Frankel, Michael H. Vartanian, David M. Gibson, 1993, Advanced Lithography.

Application And Analysis Of Production Suitability Of A Laser-Based Plasma X-Ray Stepper

Darryl W. Peters, Robert D. Frankel, Stephen M. Preston, 1988, Medical Imaging.

Polycapillary collimator for point source proximity x‐ray lithography

Robert D. Frankel, Jerry Drumheller, R. Youngman, 1993 .

Fabrication and testing of 0.1‐μm‐linewidth microgap x‐ray masks

Mark L. Schattenburg, Darryl W. Peters, Robert D. Frankel, 1990 .

Novel on-axis interferometric alignment method with sub-10 nm precision

Robert D. Frankel, Henry I. Smith, Euclid E. Moon, 1993 .