Chisato Fukai

Enhanced Crystallinity at Initial Growth Stage of Microcrystalline Silicon on Corning #7059 Glass Using SiH2Cl2

Takuya Nakamura, Hajime Shirai, H. Shirai, 1999 .

Fast Deposition of Microcrystalline Silicon Using High-Density SiH4 Microwave Plasma

Hajime Shirai, Hiroyuki Ueyama, H. Shirai, 1999 .