Tae-Hoon Jung

Controlled growth and properties of p-type cuprous oxide films by plasma-enhanced atomic layer deposition at low temperature

Jin-seong Park, K. Chung, Se‐Hun Kwon, 2013 .

The growth behavior and properties of atomic layer deposited zinc oxide films using hydrogen peroxide (H2O2) and ozone (O3) oxidants

Jin-seong Park, Hyun-Suk Kim, Jozeph Park, 2015 .

Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition

Jin-seong Park, Y. Jeong, Dongho Kim, 2013 .

Hybrid DHF and N2 jet spray cleaning for silicon nitride and metal layer DRAM patterns

Dong-Kyu Lee, Hunhee Lee, Jin-Goo Park, 2020 .