T. Gumprecht

Characterization of thin ZnO films by vacuum ultra-violet reflectometry

P. Petrik, B. Beckhoff, L. Pfitzner, 2012 .

Particle Free Handling of Substrates

M. Pfeffer, T. Gumprecht, Hassan Samadi, 2015, IEEE Transactions on Semiconductor Manufacturing.

Characterization of ZnO structures by optical and X-ray methods

P. Petrik, B. Beckhoff, M. Lemberger, 2013 .

Comparative measurements on atomic layer deposited Al2O3 thin films using ex situ table top and mapping ellipsometry, as well as X-ray and VUV reflectometry

M. Fried, P. Petrik, M. Lemberger, 2013 .

Low temperature deposition of silicon nitride using Si3Cl8

J. Sundqvist, S. Riedel, T. Gumprecht, 2015 .