Audrey Berthelot

HF Vapor Release Assessment to Address NEMS Applications

Laurent Lachal, Sylvain Auclair, Pascal Lavios, 2008 .

Micro PA detector: pushing the limits of mid IR photoacoustic spectroscopy integrated on silicon

H. Lhermet, Thierry Verdot, Audrey Berthelot, 2020, OPTO.

Resilience to Vibration of a Tuning Fork MEMS Gyroscope

Guillaume Jourdan, Patrice Rey, Thierry Verdot, 2016 .

Evolution of materials technology for stacked-capacitors in 65 nm embedded-DRAM

Pascale Mazoyer, Steven Smith, Audrey Berthelot, 2005 .

Method of producing vertical interconnects through the layers

Audrey Berthelot, Jean Philippe Polizzi, 2011 .

Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope

Guillaume Jourdan, Patrice Rey, Audrey Berthelot, 2017 .

MEMS reliability study in shock environments through numerical and experimental investigations

Audrey Berthelot, Alexandre Charles, Guillaume Lehée, 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges

Thierry Verdot, Brigitte Desloges, Audrey Berthelot, 2018, 2018 IEEE Micro Electro Mechanical Systems (MEMS).

Micro-Photoacoustic Cell with Integrated Microphone for Sub-Ppm Gas Sensing

Maryse Fournier, Thierry Verdot, Brigitte Desloges, 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).

Analysis of Mode-Split Operation in MEMS Based on Piezoresistive Nanogauges

Giacomo Langfelder, Alessandro Tocchio, Antonio Francesco Longoni, 2015, Journal of Microelectromechanical Systems.

Active NEMS combining a single crystal silicon mechanical structure and an embedded MOSFET transistor for sensing and RF applications

Laurent Duraffourg, Julien Arcamone, Eric Colinet, 2011 .

Ultra-compact and highly sensitive pressure sensor based on nano-gauge detection and cointegrated with inertial sensors

Guillaume Jourdan, Patrice Rey, Audrey Berthelot, 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).

Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors

Giacomo Langfelder, Patrice Rey, Audrey Berthelot, 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).