Neil Benjamin

Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces

Eray S. Aydil, E. Aydil, Erik A. Edelberg, 1999 .

Topographic Dependence Of Plasma Charging Induced Device Damage

Vahid Vahedi, Andrew Perry, Neil Benjamin, 1997, 2nd International Symposium on Plasma Process-Induced Damage.

High‐impedance capacitive divider probe for potential measurements in plasmas

Neil Benjamin, N. Benjamin, 1982 .