O. Tabata
发表
K. Sugano,
Y. Hirai,
T. Tsuchiya,
2013,
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).
Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films
T. Tsuchiya,
T. Tsuchiya,
Y. Taga,
1997,
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
Y. Hirai,
T. Tsuchiya,
S. Park,
2015,
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
K. Sugano,
T. Tsuchiya,
O. Tabata,
2007,
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
K. Kamei,
Y. Hirai,
T. Tsuchiya,
2015,
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
K. Sugano,
T. Tsuchiya,
O. Tabata,
2007,
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).
K. Sugano,
T. Tsuchiya,
T. Tsuchiya,
2012,
Journal of Microelectromechanical Systems.