Michael Lang

发表

Sensitivity comparison of fast integrated die-to-die T+R pattern inspection, standard database inspection, and STARlight2 contamination mode for application in mask production

Thomas Schulmeyer, Heiko Schmalfuss, Jan Heumann, 2007, SPIE Photomask Technology.

Feasibility demonstration of the micropropulsion cold gas thruster system

Urban Simu, Kerstin Jonsson, Johan Köhler, 2000 .

Introduction of new database reflected tritone algorithm for application in mask production

Thomas Schulmeyer, Heiko Schmalfuss, Jan Heumann, 2008, European Mask and Lithography Conference.

Development and Characterization of Vacuum Plasma Sprayed SOFC Components for a New Planar Cell Design

Günter Schiller, Michael Lang, M. Bilgin, 1998 .

Results of new mask contamination inspection capability STARlight2+ 72nm pixel with cell-to-cell HiRes5 for qualifying memory masks in wafer fabs

Russell Dover, Michael Lang, Andreas Jahnke, 2008, Photomask Technology.

Fabrication of Thin-Film SOFC by Plasma Spray Techniques

Günter Schiller, R. Ruckdäschel, Michael Lang, 2000 .

AltPSM Inspection Capability and Printability of Quartz Defects

Larry S. Zurbrick, Jan Heumann, Michael Lang, 2002, Photomask Technology.

Understanding the Resistances and Voltage Losses of SOFC Stacks

Moritz Henke, Michael Lang, Corinna Auer, 2015 .

Systems for the automated 3D assembly of micro-tissue and bio-printing of tissue engineered constructs

Michael Lang, M. Lang, 2012 .

Understanding the Electrochemical Behavior of SOFC Stacks

Caroline Willich, Moritz Henke, Guenter Schiller, 2013 .

External-cavity diode lasers provide absolute references for WDM testing

Michael Lang, 1998 .

Micro machined propulsion components

Urban Simu, Johan Köhler, Lars Stenmark, 1997 .

DC- and RF-Plasma Deposition Processes, Tools for the Production of Solid Oxide Fuel Cells (SOFC)

Günter Schiller, M. Müller, R. Ruckdäschel, 1999 .

Defect inspection of quartz-PSMs: taking a leap forward

Larry S. Zurbrick, Michael Lang, Jan Heumann, 2004, SPIE Advanced Lithography.

Wafer fab mask qualification techniques and limitations

Christopher A. Spence, Kaustuve Bhattacharyya, Cyrus E. Tabery, 2006, SPIE Photomask Technology.

Enhancing productivity and sensitivity in mask production via a fast integrated T+R pattern inspection and STARlight-2 contamination inspection on critical layers

Swapnajit Chakravarty, Kaustuve Bhattacharyya, Thomas Schulmeyer, 2007, Photomask Japan.

Quality Assurance of Solid Oxide Fuel Cell (SOFC) and Electrolyser (SOEC) Stacks

Xiufu Sun, Stephen J. McPhail, Karine Couturier, 2017 .

High-resolution mask inspection in advanced fab

Stephen Cox, Kaustuve Bhattacharyya, Bryan Reese, 2006, SPIE Photomask Technology.

Understanding the Electrochemical Performance of SOFC Stacks

Michael Lang, Corinna Auer, Felix Hauler, 2015 .

D.3.1 Test Matrix Document

Karine Couturier, Stephen Mc Phail, Qingxi Fu, 2014 .

Future perspectives of SOFC/SOEC applications and the role of standardization

Eva Ravn Nielsen, Stephen Mc Phail, Georgios Tsotridis, 2014 .

DC and RF Plasma Spray Processes for the Fabrication of Solid Oxide Fuel Cell Components

Günter Schiller, M. Müller, R. Ruckdäschel, 2001 .

Integrated system for 3D assembly of bio-scaffolds and cells

Wenhui Wang, Xiaoqi Chen, Michael Lang, 2010, 2010 IEEE International Conference on Automation Science and Engineering.

Vacuum Plasma Spraying of Thin-Film Planar Solid Oxide Fuel Cells (SOFC) - Development Status at DLR Stuttgart

Günter Schiller, Michael Lang, Rudolf Henne, 2002 .

Ultrasonic transducer for flow rate measuring equipment

Michael Steinacher, Michael Lang, Urs Wuest, 1991 .

Results of new mask contamination inspection capability STARlight2+ 72nm pixel for qualifying memory masks in wafer fabs

Russell Dover, Michael Lang, Jinggang Zhu, 2008, Photomask Japan.

SOCTESQA - Solid Oxide Cell and Stack Testing, Safety and Quality Assurance

Corinna Auer, Karine Couturier, Eva Ravn Nielsen, 2014 .

Current Status of Metallic Substrate Supported Thin-Film SOFC at DLR Stuttgart

Thomas Franco, Günter Schiller, R. Ruckdäschel, 2001 .

Injection system for cellular assembly of 3D bio-tissue engineered constructs

Wenhui Wang, Xiaoqi Chen, Michael Lang, 2012, 2012 IEEE International Conference on Automation Science and Engineering (CASE).

Investigation of solid oxide fuel cell short stacks for mobile applications by electrochemical impedance spectroscopy

Norbert Wagner, Patric Szabo, Michael Lang, 2008 .

Post mortem analysis of ageing mechanisms in LiNi0.8Co0.15Al0.05O2 – LiNi0.5Co0.2Mn0.3O2 – LiMn2O4/graphite lithium ion batteries

Michael Lang, Helmut Ehrenberg, Verena Liebau, 2020 .

Characterization of SOFC Stacks during Thermal Cycling

Andreas Friedrich, Christina Westner, Michael Lang, 2012 .

The influence of cycling temperature and cycling rate on the phase specific degradation of a positive electrode in lithium ion batteries: A post mortem analysis

Michael Lang, Helmut Ehrenberg, Verena Liebau, 2016 .

Development and characterization of vacuum plasma sprayed thin film solid oxide fuel cells

Günter Schiller, Michael Lang, Rudolf Henne, 2001 .

Solar heat integrated solid oxide steam electrolysis for highly efficient hydrogen production

Nathalie Monnerie, Günter Schiller, Patric Szabo, 2019, Journal of Power Sources.

Development of Solid Oxide Fuel Cells by Applying DC and RF Plasma Deposition Technologies

Günter Schiller, Michael Lang, Rudolf Henne, 2004 .